摘要
A horizontal p-i-n ridge waveguide emitter on a slion(100)substrate with a Gen,g1Sno.c9/Ge multi quantum-well(MQW)active layer was fabricated by molecular beam epitaxy.The device structure was designed to reduce light absorption of metal electrodes and improve injection efficiency.Electroluminescence(EL)at a wavelength of 2160 nm was observed at room temperature.Theoretical calculations indicate that the emission peak corresponds well to the direct bandgap transition(nr-mHr).The light output power was about 2.0μW with an injection current density of 200 kA/cm^2.These results show that the horizontal GeSn/Ge MQW ridge waveguide emiters have great pros-pects for group-IV light sources.
基金
National Key Research and Development Program(2018YFB2200103,2018YFB2200501)
National Natural Science Foundation of China(61674140,61675195,61774143,61975196)
Key Research Program of Frontier Sciences(QYZDY-SSW-JSC022).