摘要
本文介绍多晶硅高盐水的处理工艺及特点,总结了除硅、脱碳、MVR蒸发、三效蒸发等工序的运行情况,提出了多晶硅高盐水处理的工艺控制参数。
This paper introduces the processing technology and characteristics of polysilicon high salt water, summarizes the operation of silicon removal, decarburization, MVR evaporation and three-effect evaporation, and puts forward the process control parameters of polysilicon high salt water treatment.
作者
王海元
Wang Haiyuan(Zigong Light Industrial Design and Research Institute Co.,Ltd.,Zigong,Sichuan,643000)
出处
《中国井矿盐》
CAS
2020年第4期1-3,6,共4页
China Well and Rock Salt
关键词
多晶硅高盐水
除硅
脱碳
氯化钙
多效及MVR蒸发
Polysilicon high salt water
silicon removal
decarburization
calcium chloride
multiple effect and MVR evaporation
