标准球面透镜的几何特性与误差分析

Geometric characteristics and error analysis of standard spherical lens

标准球面透镜是斐索型干涉仪的核心器件,综述标准球面透镜的几何特性和误差。分析标准球面透镜在干涉照明光路和成像光路中的作用,重点介绍并实验验证了球面干涉成像的R-sinθ几何特性关系模型,给出了采用Q非球面实现非球面分裂的新型设计方法,以及2片式非球面标准球面透镜结构的实例,概述了针对小F数标准球面透镜球面干涉腔中的待测球面调整误差和移相空间非均匀性误差的研究成果,介绍了校正球面干涉腔中误差的波面差分算法,指出在近标准球面透镜焦点位置测量球面时的回程误差影响,从物像共轭关系角度解释了近焦点位置回程误差较大的原因,比对分析了标准球面透镜的透射波前与斜率对回程误差的影响。提出了在设计标准球面透镜时需注意的几何特性关系,以及使用标准球面透镜时易产生的误差和相应的抑制方法。

The standard spherical lens plays an important role in the Fizeau interferometer. The geometric characteristics and error analysis of standard spherical lens were reviewed. The effect of standard spherical lens on interference illumination optical path and imaging optical path was first analyzed;the R-sinθ geometric characteristics relation model of spherical interference imaging was emphatically introduced and verified with experiments;a new design method of aspheric surface splitting using Q aspheric surface was described, and an two-piece type aspheric standard spherical lens structure was presented;the research results of spherical adjustment error to be measured and phase shift space nonuniformity error for small F-number standard spherical lens were summarized;a wave surface difference algorithm for correcting errors in a spherical interferometer was presented;the effect of retrace error when measuring the spherical surface at the focal position near the standard spherical lens was pointed out;from the conjugation relation angle of object image,the reason of large retrace error of near focal position was explained, and the effect of transmission wave front and slope of standard spherical lens on retrace error was analyzed. The geometric characteristics relation which should be paid attention to when designing the standard spherical lens, the errors which were easy to generate when using the standard spherical lens and the corresponding suppression methods were put forward.