电子行业洁净室用过滤材料性能研究与评价

Research and Evaluation of Filter Material Performance for Electronics Industry Cleaning Room

对洁净室及空气过滤器的相关概念进行了简述,使用扫描电子显微镜、PMI孔径测试仪等手段,研究了PTFE复合空气滤纸的结构特点,通过分析结构与性能之间的关系,得到了过滤材料结构和性能的粗略对应关系,并能初步预测各滤料的过滤性能。

The related concepts of cleaning room and air filter were briefly described.The structural characteristics of PTFE composite air filter paper were studied using scanning electron microscope,PMI porometer and other means.By analyzing the relationship between structure and performance,a rough correspondence between the structure and performance of the filter material was obtained,and the filtering performance of each filter material could be predicted initially.