高度梯度微纳结构的自动化电镀制备方法

Automated Electroplating for Gradient Height Micro-nano Structures Fabricating

纳米生物医学需要制备多种微纳米结构,为解决高度梯度微纳结构制备的问题,采用可控垂直拉升电镀的方法,在导电基底ITO玻璃表面制备微纳米通道。以带有微纳米结构的导电基底材料作为掩膜板,通过调节电镀过程中基底垂直拉升的速度,以控制电镀掩膜板表面的电镀时间,来制备具有高度梯度的微纳米结构。根据这一方法不断优化实验装置,设计开发出高度梯度微纳米结构制备自动化平台。该平台集成了常规电镀方法和不同高度梯度结构电镀方法中的各种功能模块,系统集成度高,实验条件控制精确稳定,使得高度梯度微纳结构的制备简单化、高效化。

Micro-nano structures are generally used in nano-biomedicine. In order to fabricate gradient height micro-nano structures on conductive ITO glass substrates,controllable vertical pull-up electroplating was utilized. ITO glass with micro-nano structures was used as a mask,and the gradient height micro-nano structures were fabricated by controlling the vertical pull-up velocity of ITO glass. Therefore,the electroplating time increases gradient in the process of vertical pull-up. An automatic experimental equipment for fabricating gradient height micro-nano structures is fabricated after optimizing the experimental process. Multiple functional components are integrated in this platform,including the conventional electroplating and gradient height electroplating. The system was highly integrated and the experimental conditions can be stable and precise controlled. Therefore,the preparation of height-gradient micronano structures can be simple and efficient realized.