基于FOA-LSSVM算法的扩散硅压阻式压力传感器温度补偿

Temperature Compensation of Diffused Silicon Piezoresistive Pressure Sensor Based on FOA-LSSVM Algorithm

扩散硅压阻式压力传感器具有精度高、灵敏度高、动态响应快等优点,但是存在严重的温度漂移现象,因此必须对其进行温度补偿。针对扩散硅压阻式压力传感器的温度漂移现象,设计了一种基于果蝇算法优化最小二乘支持向量机(FOA- LSSVM)算法的温度补偿模型。首先,运用MPX10扩散硅压阻式压力传感器和LM35温度传感器,进行压力和温度的二维标定试验。然后,利用果蝇优化算法(FOA)自动寻优的优点,解决了最小二乘支持向量机(LSSVM)手动选取参数的问题,从而提高了算法的效率和补偿精度。试验证明,运用FOA- LSSVM算法对扩散硅压阻式压力进行温度补偿,零位温度系数( α 0 )和灵敏度温度系数( α s )均提高了一个数量级,达到了对该传感器温度补偿的目的。

The diffused silicon piezoresistive pressure sensor has the advantages of high precision,high sensitivity and fast dynamic response,but the temperature drift is too large.A temperature compensation model based on drosophila fly optimization least square support vector machine (FOA- LSSVM) algorithm was designed for the temperature drift of diffused silicon piezoresistive pressure sensors.First,the pressure and temperature calibration experiments are carried out with MPX10 diffused silicon piezoresistive pressure sensor and LM35 temperature sensor.Then,by using the advantage of fruit fly optimization algorithm (FOA),the least square support vector machine (LSSVM) can select parameters manually,which improves the efficiency and compensation accuracy of the algorithm.Experimental results show that the zero temperature coefficient ( α 0 ) is improved by one order of magnitude and the sensitivity temperature coefficient ( α s ) is improved by one orders of magnitude by using FOA- LSSVM algorithm for temperature compensation of diffused silicon piezoresistive pressure.