不同Sn含量氧化铟锡靶材的制备及其第二相特征

Preparation of ITO Targets with Different Sn Contents and Characteristics of Second Phase

以气化In2O3和SnO2粉为原料,在原料体系中按照SnO2为4%(质量分数)、6%、8%和10%的比例分别与In2O3混料,使用模压辅助冷等静压(CIP)成型的方法制备出ITO(氧化铟锡)靶材坯体,并在1550℃氧气氛条件下烧结,制得不同Sn含量的ITO靶材;将靶材试样粉碎、过筛后腐蚀,并提取腐蚀产物,对不同Sn含量靶材表面及腐蚀产物的显微组织、物相组成、密度和电阻率进行了观察和测试,并进行分析。结果表明:腐蚀产物为ITO靶材第二相In4Sn3O12;ITO靶材的晶粒尺寸随SnO2含量的增加而减小,晶界第二相总量逐渐提高并稳定在3μm以下;靶材晶内小颗粒尺寸随SnO2含量的增加而增大,并稳定在100 nm以下;靶材第二相均出现微量失氧,且失氧率均在1.1%左右;靶材的实际密度和理论密度均随SnO2含量的增加而提高,其中,实测密度由7.110 g/cm3提高至7.145 g/cm3;靶材电阻率随SnO2含量的增加而提高,由1.3×10–4?·cm提高至约1.9×10–4?·cm。

An ITO green body was prepared via molding-assisted cold isostatic pressing with gasified In2O3 and SnO2 powder(n(In2O3)/n(SnO2)=9:1).The ITO targets with different Sn contents were sintered in oxygen atmosphere at 1550℃.The target samples were ground and then corrosion products were extracted after sieving and being corroded.The microstructure,phase composition,density and resistivity of the target surface and corrosion products at different Sn contents were analyzed.The results show that the corrosion product is the second phase-In4Sn3O12 of the ITO target.The grain size of the ITO target decreases with the increase of SnO2 content,and the second phase of the grain boundary gradually increases and stabilizes at below 3μm.The size of small particles in the ITO target increases with the increase of SnO2 content and is stable below 100 nm.The second phase of the target has a trace amount of oxygen loss at the loss rate of 1.1%.The actual and theoretical densities of the target increase with the increase of SnO2 content.The measured density increases from 7.110 to 7.145 g/cm3 and the resistivity of the target increases from 1.3×10–4 to 1.9×10–4?·cm with the increase of SnO2 content.