电磁辅助压电致动器设计开发与性能测试研究

Research on Design and Performance Analysis by Using Electromagnetic Assisted Piezoelectric Actuator

传统的压电致动器,受限于压电致动的小行程,通常只能测量较小的范围。研发了一种电磁辅助压电致动器,同时具备电磁式致动器长行程与压电式致动器高分辨率的特点,该致动器包含可动件、导引槽、挠性件、电磁铁、压电元件以及控制电路。首先调整挠性可调预压装置并设定电磁铁电流,使得电磁致动力处于最大静摩擦力与动摩擦力之间;再利用压电组件所产生的微震动,控制可动件与导引槽之间的接触情况在静摩擦与动摩擦之间切换,从而完成长行程(10 mm)且高分辨率(1.5μm)的往复运动。实验结果表明该致动器具备出色的定位能力。

Conventional piezoelectric actuator suffers from the limitation of small controling scale,due to the short travelling range of piezoelectric actuation.An electromagnetic assisted piezoelectric actuator was developed,which has the advantages with both long traveling range in electromagnetic actuator and high-resolution in piezoelectric actuator.The actuator consists of movable part,guide groove,flexible member,electromagnet,piezoelectric element,and control circuits.First of all,adjusting the electromagnetic force between the maximum static friction force and kinetic friction force by setting the pre-load structure and the coil current.Then,the micro-vibration was generated by piezoelectric components to control transition between static friction and kinetic friction using contact situation of the movable part and the guide groove.Therefore,the actuator can perform reciprocating motion with long traveling range(10 mm)and high resolution(1.5μm).The experiment results showed that the proposed actuator has excellent positioning ability.