高纯氟化氢中微量杂质气体测定

Determination of Trace Gaseous Impurities in High Purity Hydrogen Fluoride

采用气相色谱分析系统,建立了一种精准测定高纯氟化氢(HF)中微量杂质气体的方法。以高纯氦为载气,高纯HF经专用除水装置除水、预分离柱分离、反吹处理,气体杂质通过分子筛柱和Hayesep柱分离后进入氦放电离子化检测器(DID),用外标法定量分析微量杂质组分H2、O2+Ar、N2、CH4、CO和CO2,体积分数检出限可达10^-8,相对标准偏差(RSD)<5%。该方法准确、可靠、精密度好,能够精准检测HF气体中的微量气体杂质。

Using high-purity helium as carrying gas,method for separation and accurate determination of trace gaseous impurities in high purity hydrogen fluoride(HF) was established by dedicated gas chromatography configured with drying tube, pre-separation columns, molecular sieve column,hayesep column, backflush system and discharge ionization detector(DID). The trace impurities of H2, O2+Ar, N2, CH4, CO and CO2 were quantified by external standard method, with detection limit of 10^-8 and relative standard deviation below 5%. The established method has been demonstrated to be accurate, reliable and precise, and can be applied to the analysis of gas impurities in high purity HF gas.