深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能

Tribological Properties of CrN/TiN Superlattice Coatings Deposited by Deep Oscillation Magnetron Sputtering

研究了IN718高温合金、WC-6%Co硬质合金和Si(100)基体上深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能。研究表明,涂层的生长对基体的类型没有选择性。随着基体硬度的升高,划痕结合力失效临界载荷增大,涂层结合力失效机制由翘曲失效转变为基体/涂层协同变形,未发现涂层的剥落失效。载荷为2N时,磨损机制由磨粒磨损和氧化磨损转变为轻微磨粒磨损。载荷为4 N时,IN 718基体上涂层的磨损机制为严重的氧化磨损,WC-6%Co基体上的涂层的磨损机制为磨粒磨损和氧化磨损,氧化物的产生、堆积和转移导致摩擦系数的波动。

Tribological properties of CrN/TiN superlattice coatings deposited on IN 718,WC-6%Co and Si(100)by the combined deep oscillation magnetron sputtering were investigated.The results show that the coating growth is independent of the nature of substrate materials.As the hardness of substrate materials is increased,the scratch critical loads increase.Adhesion failure mode changes from buckling failure to cooperative deformation of substrate/coating system with only small cracks in the whole scratch track.Wear mechanism of the coatings deposited on IN 718 and WC-6%Co changes from abrasive and oxidative wear to mild abrasive wear under a normal load of 2 N.Under a normal load of 4 N,the coatings on IN 718 suffer severe oxidative wear,while the coatings on WC-6%Co suffer the combined abrasive and oxidative wear.The production,accumulation and mass transfer of oxides result in the oscillation of friction coefficient during dry sliding wear tests.