基于容栅传感器的二维微小位移测量方法研究

Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor

针对物体微小位移方向难以判别的问题,提出一种基于容栅传感器的二维微小位移测量方法以及平面内任意方向位移二元参数模型,并设计了容栅传感器和微小位移双通道测试系统。利用带有两个千分尺的模拟测试台,模拟物体在平面内微小位移(毫米级)进行测量,测试系统两个通道输出与微小位移变化对应的差分电压,通过分析两个通道的差分输出电压即可得到微小位移量值和方向。经过实验验证了测试方法的可行性以及参数模型的正确性。实验结果表明:当物体在平面坐标x轴或y轴产生单方向相对位移时,依据两个通道差分电压输出变化可以明确判断位移方向和量值;当物体在平面内任意位置产生相对位移时,基于参数模型求解结果结合两个通道差分电压输出变化量分析可以确定位移方向和量值。

A two-dimensional small-displacement measurement method based on capacitive grating sensor and a binary parameter model of displacement in any direction on a plane are proposed,and a dual-channel test system with capacitive grating sensor for small displacement is designed for the difficult discrimination of direction of small displacement of object.The small displacement(mm)of simulated object on the plane is measured on a simulation test bench with 2 micrometers.The two channels of the test system output the differential voltages corresponding to the change in small displacement.The magnitude and direction of small displacement can be obtained by analyzing the differential voltage outputs of two channels.The feasibility of the test method and the correctness of the parameter model were verified through experiment.The experimental results show that the direction and magnitude of displacement can be clearly determined according to the change in the differential voltage outputs of two channels when an object produces a relative displacement in one direction on x-axis or y-axis of the plane coordinate;and the direction and magnitude of displacement can be determined from the computed results of the parameter model by the analyzing the change in the differential voltage outputs of two channels when an object produces a relative displacement at any location on the plane.