基于CFD的气体静压高推力轴承仿真研究

Simulation of Gas Hydrostatic High Thrust Bearing Based on CFD

气体静压轴承能实现高精度而在超精密设备中备受青睐,但承载力和刚度较低长期限制着其进一步发展。针对提高气体静压轴承的承载力和刚度,基于CFD方法定量分析了气体静压止推轴承4种表面结构对其承载力和刚度的影响。基于通用曲线法编写人机交互界面计算气体静压轴承的承载力,与有限元分析结果基本吻合。运用正交试验方法分析了均压槽的长度、宽度、深度及气膜厚度对气体静压轴承的承载能力的影响程度,在兼顾稳定性的前提下优选了均压槽几何尺寸。研究结果表明,在气体静压轴承表面圆周方向和直径方向开设优选参数的均压槽能提高承载力49.71%,同时能够大幅度改善刚度。

Aerostatic bearings are highly desirable and highly favored in ultra-precision equipment,but their low bearing capacity and stiffness have long limited their further development.Aiming at improving the bearing capacity and stiffness of aerostatic bearing,the influence of four kinds of surface structures of gas static thrust bearing on its bearing capacity and stiffness was quantitatively analyzed based on CFD method.The man-machine interface was calculated based on the general curve method to calculate the bearing capacity of the aerostatic bearing,which is basically consistent with the finite element analysis results.The orthogonal test method was used to analyze the influence of the length,width,depth and film thickness of the pressure equalization groove on the bearing capacity of the aerostatic bearing.The geometry of the pressure equalizing groove was preferred under the premise of stability.The research results show that the pressure equalization groove with the preferred parameters in the circumferential direction and the diameter direction of the surface of the aerostatic bearing can increase the bearing capacity by 49.71%,and can greatly improve the rigidity.