平面型乙醇快速响应气敏传感器的制备

Preparation of Planar C2H5OH Fast Response Gas Sensor

采用水热法合成了纳米In2O3颗粒,将其旋涂于陶瓷基片上经氮化处理获得InN基片,再对InN基片进行氧化,合成出气敏材料并在一种微型平面电极片上制备了传感器件.采用扫描电子显微镜(SEM)、透射电子显微镜(TEM)、X射线衍射(XRD)仪、X射线光电子能谱(XPS)等手段对材料的形貌、组成进行了表征与分析,结果表明,最终获得了松枝状结构的InN-In2O3纳米复合材料.对器件的气敏性能进行了测试,发现基于此材料制备的平面型气敏传感器对乙醇气体具有良好的气敏性能:检测浓度为1.025 mg/m3(500 ppb)的乙醇蒸汽的灵敏度可达18;检测2.05 mg/m3(1 ppm)的乙醇的响应-恢复时间最快仅为1 s;最佳工作温度低,仅为50℃.

A nanostructured InN-In2O3 composite material was prepared by chemical synthesis.Based on the synthetic material,we prepared a fast-response gas sensor for the detection of ethanol gas.Nano-sized In2O3 particles were synthesized by hydrothermal method,spin-coated on a ceramic substrate,and obtained an InN substrate after nitriding treatment.The InN substrate was then oxidized to synthesize a gas-sensitive material and a sensor device was prepared on a miniature planar electrode sheet.The morphology and composition of the materials were characterized and analyzed by means of scanning electron microscopy( SEM),transmission electron microscopy( TEM),X-ray diffractometer( XRD),and X-ray photoelectron spectroscopy( XPS).The results showed that the final InN-In2O3 nanocomposite with a pine-like structure was presented.The corresponding gas-sensitive performance of the device was also tested,and it was proved that the flat-type gas-sensitive sensor prepared based on this material has good gas-sensitive performance for ethanol gas: The sensitivity of detecting ethanol vapor at a concentration of 1.025 mg/m3( 500 ppb) can reach 18;The response of detecting 2.05 mg/m3( 1 ppm) ethanol the fastest recovery time is only 1s;the best working temperature is low,only 50 ℃.