气浮轴承均压腔内圆角结构对振动特性影响的实验研究

Experimental study on effect of rounded structure of air-floating bearing in pressure cavity on vibration characteristics

针对不同结构的均压腔对气浮轴承微振动特性影响问题,提出了节流孔出口处圆角连接结构和均压腔出口处圆角连接结构两种能有效抑制振动强度的气浮轴承。通过搭建微振动测试实验平台,对现有均压腔内无圆角连接与提出的节流孔出口处圆角连接和均压腔出口处圆角连接的气浮轴承进行了实验对比研究;利用该平台分别对3种不同结构在不同供气压力下的微振动信号进行了采集,分析了其振动特性。研究结果表明:轴承的微振动强度随着供气压力的增大而增大,均压腔内的圆角结构对共振频率的影响较小,对振动幅值的影响较大;在较大供气压力状态下,采用均压腔内圆角结构能有效抑制轴承微振动,其中节流孔出口处圆角连接结构对轴承微振动强度的抑制效果较好。

Aiming at the problem of the influence of different cavities on the micro-vibration characteristics of air bearing,two types of air floating bearings which can effectively reduce the vibration intensity were proposed,such as a rounded connection structure at the orifice outlet and a rounded connection structure at the outlet of the pressure equalizing cavity.A micro-vibration test experimental platform was set up,and then an experiment was carried out for the air bearing without fillet connection in the cavity and the rounded connection at the outlet of the orifice and the fillet connection at the outlet of the cavity.The micro-vibration signals of three different structures under different air supply pressures were collected and analyzed by the platform.The results indicate that the micro-vibration strength of the bearing increases with the increase of the air supply pressure.The rounded structure in the equalizing cavity has a greater influence on the vibration amplitude than on the resonance frequency.Under the highly air supply pressure,the rounded structures in cavity can effectively reduce the bearing micro-vibration.And the effect of reducing the vibration strength of the fillet connection structure at the outlet of the orifice is better.