针对多工况覆晶旋转轴共振的改进型滤波器设计

Design of Improved Filter for Multiple Operating Conditions Flip-Chip Rotation Axis Resonance

针对倒装装备覆晶旋转轴的多工况共振模态问题,首先将其转化为共振特性的获取和改进型滤波器的设计问题,提出一种改进型陷波滤波器的设计方法,并分析了其数字离散化的实现过程。最终通过实验证明了滤波器对覆晶旋转轴共振抑制的有效性,提高了覆晶旋转臂的稳定性。

Aiming at the multiple operating conditions resonance modal problem of flip-chip rotation axis of flip-chip equipment,which translates into the acquisition of resonance characteristics and the design of improved filters,an improved notch filter design method is proposed,and its digital dispersion is analyzed realization process.The final experimental results show that the filter is effective in suppressing the resonance of the flip-chip rotation axis and improves the stability of the flip-chip rotary arm.