Eu^3+,Dy^3+共注入AlN薄膜结构和发光特性研究

Structure and Luminescence Properties of Eu and Dy Co-implanted AlN Films

采用离子注入方法在氢化物气相外延法生长的AlN薄膜中注入了不同剂量的Dy^3+和Eu^3+,制备了Dy^3+单掺、Dy^3+和Eu^3+共掺的AlN样品.对于Dy^3+单掺杂AlN样品,X射线衍射和拉曼散射实验结果表明随着Dy注入剂量的增加,样品的压应力也增加,形成了比较明显的损伤层;但当注入剂量由5×1014at/cm2增加至1×10^15at/cm2时,压应力增加不明显,接近于饱和.对于Dy^3+和Eu^3+共掺的AlN样品,阴极荧光实验表明,AlN中Eu^3+和Dy^3+之间可能存在能量传递,能量传递途径为在声子辅助下从Dy^3+的4F9/2→6H15/2至Eu^3+的7F0→5D2的共振能量传递.此外,计算发现改变Dy^3+和Eu^3+离子的注入剂量比能实现发光色度坐标和色温的有效调控.

Dy^3+and Eu^3+ions with different doses were implanted into AlN thin films grown by hydride vapor phase epitaxy method.For Dy doped AlN,results of X-ray diffraction and Raman scattering show that the compressive stress of the sample increases with the increase of Dy^3+dose.When the Dy3+dose increases from 5×10^14 at/cm^2 to 1×10^15 at/cm2,the compressive stress of samples is close to saturation.For Dy^3+and Eu^3+co-doped AlN,according to the cathodoluminescence spectra,a possible energy transfer process between Dy^3+and Eu^3+is proposed.In addition,through changing the dose ratio of Dy^3+respect to Eu^3+ions,the chromaticity coordinates and color temperatures of Dy3+and Eu3+co-doped AlN can be effectively regulated.