柔性功能薄膜辉光光谱深度分辨率分析

GDOES Depth Resolution Analysis of Flexible Functional Film

本文首先通过脉冲射频辉光放电发射光谱定量表征了自然生长在Si(111)基片上约1nm的SiO2膜,表明射频辉光放电发射光谱具有纳米级别的深度分辨率。随后用原子力显微镜和分光光度计对一款含有Ag层的柔性光学功能薄膜进行了表征,并利用脉冲射频辉光放电发射光谱,在不同的工作条件下对其进行了深度剖析。最后利用原子混合-粗糙度-信息深度模型对所测量的Ag深度谱进行了定量分析,获得了不同测量条件下Ag深度谱的深度分辨率,由此确定了最佳的脉冲射频辉光放电发射光谱工作条件,对获得柔性功能薄膜高分辨率深度谱具有指导意义。

In this paper,it shows firstly that the Pulsed-RF-GDOES(Pulsed-Radio-Frequency-Glow Discharge Optical Emission Spectrometry)depth profiling could reach one nanometer depth resolution as demonstrated by measuring the native SiO2 layer thickness on the Si(111)substrate.A flexible optical functional film contained an Ag sublayer was characterized by atomic force microscope and spectrophotometer.Finally,the as-measured Ag Pulsed-RF-GDOES depth profiles were evaluated quantitatively using the MRI(atomic Mixing-Roughness-Information depth)model so that the depth resolution values are obtained with different measuring conditions.To this end,the optimum working conditions of the Pulsed-RF-GDOES are determined accordingly.The current study provides a useful guidance for obtaining high resolution depth profile for the flexible functional films.