刀具基体表面织构化对硼掺杂金刚石薄膜性能的影响

Effect of Surface Texturing of Tool Substrate on Properties of Boron Doped Diamond Films

目的分析硼掺杂织构金刚石薄膜的微观组织结构和表面质量,并探究刀具基体表面不同织构对薄膜结合强度和切削性能的影响。方法通过热丝化学气相沉积(HFCVD)法,分别在表面有椭圆织构、沟槽织构和无织构的硬质合金刀具上制备硼掺杂金刚石薄膜(BDD)。运用扫描电镜(SEM)观察各薄膜表面及横截面形貌;使用白光干涉表面三维轮廓仪观测各薄膜表面粗糙度;通过拉曼光谱仪检测各薄膜组织结构;通过铣削试验分析各薄膜刀具的切削性能。结果经测试,硼掺杂无织构金刚石薄膜(Boron doped un-textured diamond film,BDUTD film)的粗糙度为299.9 nm,硼掺杂椭圆织构金刚石薄膜(Boron doped elliptical texture diamond film,BDETD film)及硼掺杂沟槽织构金刚石薄膜(Boron doped groove texture diamond film,BDGTD film)的粗糙度分别为333、323.9 nm,粗糙度略有增加。三种金刚石薄膜的厚度均为18μm,在相同切削条件下,经过铣削碳/碳-碳化硅(C/C-SiC)复合材料420 s后,BDUTD薄膜的剥落程度及其刀具磨损程度明显大于BDETD薄膜和BDGTD薄膜。结论硬质合金刀具基体表面织构化能够有效提高薄膜的结合强度,从而提高刀具的耐磨性。其中硼掺杂沟槽织构金刚石薄膜的切削性能相对更好,与普通硼掺杂金刚石薄膜刀具相比,硼掺杂织构金刚石薄膜刀具具有更长的使用寿命。

The work aims to analyze the microstructure and surface quality of boron doped textured diamond films,and explore the effects of different textures on the surface of the tool substrate on film bonding strength and cutting performance.Hot wire chemical vapor deposition(HFCVD)was used to deposit boron doped diamond film(BDD)on cemented carbide tools with elliptical texture,groove texture and non-texture on the surface.The surface and cross section morphology of the films were observed by SEM.The surface roughness of each film was detected by white light interference surface three-dimensional profiler.The structure of each film was detected by Raman spectrometer.The cutting performance of each film tool was analyzed through milling test.The roughness of the boron doped non-textured diamond film was 299.9 nm,and the roughness of the boron doped elliptical-textured diamond film and the boron doped groove-textured diamond film was 333 nm and 323.9 nm,respectively,so the roughness slightly increased.The thickness of the three diamond films was 18μm,and under the same cutting conditions,the degree of peeling of the BDUTD film and the degree of wear of tool were significantly greater than those of BDETD film and BDGTD film after treatment by milling carbon/carbon-silicon carbide(C/C-SiC)composite for 420 s.The textured carbide substrate surface can effectively improve the bonding strength of films,thereby strengthening the wear resistance of the tool.The cutting performance of the boron doped grooved textured diamond film is relatively better.Compared with ordinary boron doped diamond film tools,boron doped textured diamond film tools have a longer service life.