等离子体增强磁控溅射CrSiN涂层摩擦磨损行为

Friction and Wear Behavior of CrSiN Coatings Deposited by Plasma Enhanced Magnetron Sputtering

目的基于细晶强化理论,借助新型涂层制备技术获得综合性能优良的CrSiN涂层,研究Si含量对涂层微观结构、力学性能及耐磨性能的影响规律。方法采用等离子体增强磁控溅射技术,制备四种含有不同Si含量的CrSiN涂层。使用X射线能谱仪(EDS)、X射线衍射仪(XRD)、场发射扫描电子显微镜(FE-SEM)和原子力显微镜(AFM),分析涂层的化学成分、晶体结构、微观形貌和表面粗糙度。使用纳米压痕/划痕仪测试涂层的显微硬度、杨氏模量和结合力。使用摩擦磨损试验仪考察涂层的摩擦磨损行为。结果CrSiN涂层中Si含量随着Si靶功率的增加而增加。所有涂层中均未检测到含Si物相,主要由CrN相组成。随着Si含量的增加,CrN(111)衍射峰逐渐减弱直至消失,涂层由疏松的三角锥结构逐渐变为致密平整的CrN纳米晶和Si3N4非晶共存的复合结构,涂层表面粗糙度显著降低,涂层的显微硬度、杨氏模量、结合力及耐磨性能均呈现先增后降的趋势。结论Si含量为18.5%的CrSiN涂层具有最佳的耐磨性能,此时涂层的硬度、杨氏模量、结合力和平均摩擦系数分别约为27 GPa、327 GPa、30 N和0.289。

The work aims to obtain the CrSiN coatings with excellent comprehensive performance by new coating preparation technology based on the fine-grained strengthening theory,and to study the effects of Si content on the microstructure,mechanical properties and wear resistance of the coatings.Four CrSiN coatings with different Si contents were prepared by plasma enhanced magnetron sputtering.The chemical composition,crystal structure,micromorphology and surface roughness of the coatings were characterized by EDS,XRD,FE-SEM and AFM,respectively.The micro-hardness,Young's modulus and adhesion of the coatings were measured by nano-indentation and nano-scratch,respectively.The friction and wear behavior of the coatings was investigated by a friction and wear tester.The Si content of CrSiN coating increased with the increasing Si target power.CrSiN coatings mainly exhibited a cubic CrN phase,with no Si-containing phase detected.As the Si content increased gradually,the diffraction peak growing along CrN(111)plane was gradually weakened until disappeared,the microstructure of the coating gradually changed from loose triangular grains to compact and smooth composite structure consisting of CrN nano-crystals and Si3N4 amorphous,the surface roughness of the coating was significantly reduced,and the microhardness,Young's modulus,bonding force and wear resistance of the coating firstly increased and then decreased.The CrSiN coating with Si content of 18.5%has the best wear resistance,and its hardness,Young's modulus,bonding force and average friction coefficient are about 27 GPa,327 GPa,30 N and 0.289,respectively.