不同出气方式时多晶硅还原炉内的流场和热场模拟

SIMULATION OF FLOW FIELD AND THERMAL FIELD OF POLYSILICON REDUCTION FURNACE WITH DIFFERENT GAS OUTLET METHODS

提出了一种上出气方式的多晶硅还原炉,通过Fluent软件对其流场和热场进行了模拟计算,并与传统的下出气方式的多晶硅还原炉进行了对比。结果显示,上出气方式的多晶硅还原炉可以改善还原炉顶部封头区域的流场,能使硅棒上部和横梁表面受到一定流速的流体的冲刷扰动,可以减轻甚至避免“爆米花”现象的发生;同时也能解决下出气方式时多晶硅还原炉的上部空间温度过高和流速偏小的问题,削弱无定型硅粉的产生条件。

The top gas outlet method of polysilicon reduction furnace is proposed.The flow field and thermal field are simulated and calculated by Fluent software,and compared with the traditional polysilicon reduction furnace with bottom gas outlet method.The results show that the polysilicon reduction furnace with the top gas outlet method can improve the flow field in the head area of the reduction furnace.It can also solve the problems of excessively high temperature and small flow rate in the upper space of the traditional gas outlet reduction furnace,and weaken the production conditions of amorphous silicon powder.