全固态高稳定355nm紫外脉冲激光器

All-solid-state High Stability 355nm Ultraviolet Pulsed Laser

本文报道了分别采用腔外倍频腔外和频技术以及腔内倍频腔内和频技术实现高功率紫外脉冲355nm激光输出。采用腔外倍频腔外和频结构,在泵浦功率26W,重复频率49kHz时,获得了平均功率3.8 W的355 nm紫外脉冲激光输出,从泵浦光到紫外光的光-光转化效率14.6%,光束质量为Mx^2=1.44,My^2=1.13,可在250h内连续不间断稳定激光输出。采用腔内倍频腔内和频结构,在泵浦功率20.9W,重复频率42kHz时,获得了平均功率3.2W的355 nm脉冲激光输出,光-光转化效率15.3%,光束质量为Mx^2=1.10,My^2=1.13,连续不间断稳定激光输出时间超过1500h。

In this paper,the output of high power UV pulse at 355 nm was reported,which was realized by using extra cavity SHG extra cavity THG technology and intra cavity SHG intra cavity THG technology.Using extra cavity SHG extra cavity THG structure,at a pump power of 26 W and a repetition frequency of 49 kHz,a 355 nm UV pulse laser output with an average power of 3.8 W is obtained.The light-to-light conversion efficiency from pump light to UV light is 14.6%.The beam quality is Mx^2=1.44,My^2=1.13,which can continuously and continuously stabilize the laser output within 250 hours.Using the intra cavity SHG intra cavity TH G structure,at a pump power of 20.9 W and a repetition frequency of 42 kHz,a 355 nm pulsed laser output with an average power of 3.2 W is obtained.The light-to-light conversion efficiency is 15.3%and the beam quality is Mx^2=1.10,My^2=1.13 continuous uninterrupted stable laser output time exceeds 1500 hours.