三维纳米线SAW气体传感器及报警器设计

Design of a 3-D Nanowire SAW Gas Sensor and Alarm Detector

该文提出了一种全新的三维纳米线结构的声表面波(SAW)气体传感器,详细阐述了谐振型SAW器件上纳米线制备与修饰改性设计,传感器信号提取电路设计及报警器设计等过程,最后研制出气体报警器样品。并利用沙林(GB)模拟剂对传感器性能指标进行了测试,该传感器的响应阈值低达2 mg/m3,响应时间仅约为20 s。结果表明,与传统二维结构的SAW气体传感器相比,三维纳米线结构的SAW气体传感器在响应阈值和响应时间上均有很大的提高。

In this paper,a new SAW gas sensor with three-dimensional nanowire structure is presented.The preparation and modification of nanowire on SAW resonator,the design of sensor signal extraction circuit and the design of alarm detector are described in detail.In the end,a gas alarm detector sample is developed,and the performance index of the sensor is tested with GB simulator,the response threshold of the sensor is 2 mg/m3,and the corresponding time is only 20 s.The results show that the three-dimensional nanowire SAW gas sensor has a significant improvement both in response threshold and in corresponding time compared with the conventional two-dimensional SAW gas sensor.