微金字塔阵列结构的飞刀切削技术研究

Research on flying cutting technology with micropyramid array structure

微结构阵列光学元件的加工受到越来越广泛的关注,单点金刚石飞刀切削技术以高效率低成本且加工精度高的优势,逐渐应用于微结构的加工。本文主要研究飞刀切削微金字塔结构时,机床重复定位误差和循环加工引入的误差对微结构切削效果的影响,分析V槽切削时次沟槽产生的条件,研究抑制次沟槽产生方法,实验验证了可以通过控制切削深度大于最小切削深度来抑制次沟槽的产生。

The fabrication of optical elements with microstructural arrays has attracted more and more attention.Single-point diamond flying cutting technology has been gradually applied to the fabrication of microstructures with the advantages of high efficiency,low cost and high machining accuracy.This paper mainly studies the influence of repeated positioning errors of machine tools and errors introduced by cyclic machining on micro-structure turning effect when flying cutter turning micro-pyramid structure,analyses the conditions of secondary groove generation in V-groove turning,studies the methods of restraining secondary groove generation,and finally verifies through experiments that the generation of secondary groove can be restrained by controlling the turning depth greater than the minimum turning depth.