基于近红外技术的流体机械密封膜厚检测方法研究

Application of near-infrared technique in film thickness measurement of fluid mechanical sealing

流体机械密封膜厚的检测受到封膜波束扰动因素影响,导致检测的精度不好,为了提高膜厚检测能力,提出一种基于近红外技术的流体机械密封膜厚检测方法。构建流体机械密封膜厚检测的近红外传感信号模型,采用群延迟空间波束集成方法进行流体机械密封膜厚的红外信号波形聚能处理,提取近红外传感信号的统计特征量,采用自相关匹配检测方法进行流体机械密封膜厚探测信号的滤波处理,对输出信号采用多维小波尺度分解方法进行近红外传感信号的尺度分解,根据尺度的指向性特征进行流体机械密封膜厚参数估计,实现流体机械密封膜厚检测。仿真结果表明,采用该方法进行流体机械密封膜厚检测的精度较高,耗时较短,具有实用性。

The film thickness detection of fluid mechanical sealing is affected by the disturbance factor of sealing film beam,which leads to poor accuracy.In order to improve the detection ability of film thickness,a detecting method of film thickness of fluid mechanical seal film based on near-infrared technique is proposed.A near-infrared sensing signal model for measuring the film thickness of fluid mechanical seal is constructed.The massing energy of infrared signal waveform of fluid mechanical sealing film thickness is processed by group delay spatial beam integration method.The statistical characteristic quantity of near-infrared sensing signal is extracted.The auto-correlation matching detection method is used to filter the detecting signal of fluid mechanical seal film thickness,and the multi-dimensional wavelet scale decomposition method is used to decompose near-infrared sensing signal.The thickness parameters of fluid mechanical sealing film are estimated according to scale directivity,and the film thickness measurement of fluid mechanical sealing is realized.The simulation results show that this method has high accuracy,short time and practicability.