高一致性电容型次声传感器研究

Research on High Consistency Capacitance Infrasound Sensor

对电容型次声传感器一致性影响因素及控制方法展开研究。基于圆形固支振膜模型得到一致性误差表达式,并推导各结构模块加工误差与传感器一致性对应关系。在此基础上,采用激光测振法精确测量振膜谐振频率,实现谐振频率误差控制;采用高精度阻抗分析仪精确测量极头电容值,实现极间距误差控制。通过12台次声传感器灵敏度对比实验,验证了一致性误差控制理论的有效性。实验结果表明,通过控制振膜谐振频率和极间距能够实现次声传感器灵敏度调节,使一致性误差小于5%,研究结果能够指导次声传感器参数设计。

In this paper,the influence factors and control methods of capacitive infrasonic sensors are studied.The consistency error expression is obtained based on the circular solid supported diaphragm model and the corresponding relation between the processing error of each structure module and the consistency of the sensor is derived.On this basis,the resonance frequency of diaphragm is accurately measured by laser vibration measurement method,and the resonance frequency error control is realized.A high precision impedance analyzer is used to accurately measure the electrode capacitance and control the error between the poles.The effectiveness of the consistency error control theory is verified by comparing the sensitivity of 12 infrasound sensors.The experimental results show that the sensitivity of infrasound sensor can be adjusted by controlling the diaphragm resonance frequency and pole spacing,and the consistency error is less than 5%.The research in this paper can guide the parameter design of infrasound sensor.