钛合金基材表面粗糙度对Ti/TiN/Zr/ZrN多层膜性能的影响

Effect of surface roughness of titanium alloy substrate on properties of Ti/TiN/Zr/ZrN multilayer film

为提高钛合金的抗冲蚀性能,采用真空阴极电弧离子镀技术在不同表面粗糙度(Ra)的TC4钛合金表面制备了Ti/TiN/Zr/ZrN多层膜。采用扫描电镜(SEM)、X射线衍射仪(XRD)、显微硬度计、划痕仪和砂粒冲刷试验仪分析了多层膜的截面形貌、微观结构、厚度、显微硬度、结合力和抗砂粒冲刷性能。重点研究了基体表面粗糙度对多层膜的结合力和抗砂粒冲刷性能的影响。结果表明,所得Ti/TiN/Zr/ZrN多层膜厚度约为12μm,显微硬度大于3000 HV,能显著地提高TC4钛合金基材的抗砂粒冲刷性能。在相同工艺条件下,基体表面粗糙度越小,其表面膜层的结合力和抗砂粒冲刷性能越佳。为获得综合性能良好的Ti/TiN/Zr/ZrN多层膜,TC4钛合金基体的表面粗糙度必须控制在≤1.60μm。

To improve the erosion resistance of titanium alloy,Ti/TiN/Zr/ZrN multilayer films were prepared on TC4 titanium alloy with different surface roughness(Ra)by vacuum cathodic arc ion plating.The surface morphology,microstructure,thickness,microhardness,adhesion strength,and sand erosion resistance of the multilayer film were analyzed using scanning electron microscope(SEM),X-ray diffractometer(XRD),microhardness tester,scratch tester,and sand erosion tester,respectively.The effect of the surface roughness of substrate on the adhesion strength and sand erosion resistance of multilayer film was studied.The results showed that the Ti/TiN/Zr/ZrN multilayer film had a thickness of ca.12μm and a microhardness of 3000 HV above,and improved the sand erosion resistance of TC4 titanium alloy greatly.The lower the surface roughness of substrate is,the better the adhesion strength and sand erosion resistance of multilayer film deposited under the same process conditions are.The surface roughness of TC4 titanium alloy substrate should be controlled to 1.6μm or lower for depositing a Ti/TiN/Zr/ZrN multilayer with excellent comprehensive performance on it.