叉指形电极压电陶瓷驱动器性能有限元分析

Finite Element Analysis on Performance of Interdigital Electrode Piezoelectric Ceramic Actuator

提出了一种新型管状叉指形电极压电陶瓷驱动器,首先基于ABAQUS有限元仿真软件分析其静力学性能。着重研究了电极结构关键尺寸对元件夹持应力、自由应变的影响,同时对比分析了普通型压电元件的轴向驱动性能。研究结果表明:在200 V驱动电压下,管状叉指形电极压电元件轴向夹持应力能达到普通型的2.5倍,轴向自由应变能达到普通型的1.5倍。然后采用有限元法对压电元件进行振动模态分析,确定最佳振动模态及其轴向振动云图。最后在模态分析基础上,对压电元件进行谐响应分析,得到模型的轴向谐振频率和幅频特性曲线,从而获得了较为全面的驱动特性,为管状叉指形电极压电陶瓷元件的设计和制造提供一定的理论依据。

A new type of tubular interdigital piezoelectric ceramic actuator is proposed.Based on ABAQUS finite element analysis software,the static performance of the piezoelectric component are analyzed.The influence of key dimensions of electrode structure on clamping stress and free strain of piezoelectric components is studied emphatically,and the axial driving performance of ordinary piezoelectric componentts is compared and analyzed.The results show that under the driving voltage of 200 V,the axial clamping stress of the tubular interdigital piezoelectric component can reach 2.5 times of the ordinary type,and the axial free strain can reach 1.5 times of the ordinary type.The finite element method is used to analyze the vibration mode of the piezoelectric component to determine the optimal vibration mode and its axial vibration cloud diagram.Finally,based on the modal analysis,the harmonic response analysis of the piezoelectric component is performed to obtain the axial resonance of the model Frequency and amplitude-frequency characteristic curves,thus obtaining more comprehensive driving characteristics.It provides important value for the design and analysis of piezoelectric ceramic actuators with tubular interdigital electrodes.