在片微波参数测量系统计量技术进展

Recent Metrology Progress for On-Wafer Microwave Measurement Systems

在片微波参数测量系统主要通过探针台建立微波仪器与半导体裸芯片之间的信号连接通道,从而测量半导体裸芯片的微波参数。在片微波参数测量系统对提升芯片的性能,控制质量,保证芯片的一致性和稳定性方面具有重要的意义。国外相关的计量技术与测量系统同步发展,我国由于半导体产业起步较晚,测试系统大多采用进口,相关计量测试技术在过去很长一段时间发展相对缓慢。最近10年我国奋起直追,不断缩小与世界先进水平的差距,目前已经完成40 GHz以内的主要在片微波参数测量系统计量能力。文中回顾了本领域的技术发展历程,介绍国内外技术发展特点,对于进一步发展相关计量技术具有指导意义。

On-wafer microwave measurement systems use probe stations to establish a signal connection channel between microwave instruments and semiconductors chips,and thereby measure the microwave parameters of the chips.On-wafer microwave measurement systems are of great significance in improving chip performance,controlling quality,and ensuring chip consistency and stability.On-wafer measurement systems and related measurement technologies in foreign countries developed synchronously.Due to the late start of the semiconductor industry in China,most of the test systems have been imported,and the related measurement and testing technologies have developed relatively slowly in the past for a long time.In the recent 10 years,China has been striving to catch up and continue to narrow the gap with the world’s advanced level.At present,we have completed the measurement capabilities of the main on-wafer microwave parameter measurement systems within 40 GHz.This paper reviews the developing technology of this field,talks about the characteristics of technology development at home and abroad,and has guiding significance for the further development of related measurement technologies.