扫描投影光刻机激光安全互锁设计及安全风险评估

Laser Safety Interlock Design and Risk Assessment for Scanner Lithography

针对扫描投影光刻机激光安全防护需求,在整机电气安全与诊断系统中通过硬件互锁进行了激光安全互锁设计,并提供监测报警机制,增强了光刻机产品的安全性与可靠性,达到了预期的设计目的。通过对激光安全互锁电路进行安全风险评估,达到了预期的安全性能等级PLd级,为光刻机及其衍生产品的部件安全防护提供了设计以及安全性评价参考。

Laser safety interlock design is provided to meet scanner lithography laser safety protection requirements by hardware interlock added in electrical safety and diagnosis system,this paper provides monitoring and alarm mechanism,enhances safety and reliability of the product,and achieves the desired design purpose.The expected safety level PLd is achieved through safety risk assessment of the laser safety interlock circuit,and reference of design and safety evaluation is provided to the machine and its derivatives'component safety protection.