基于激光散射的表面粗糙度测量系统研究

Research of surface roughness measurement system based on laser scattering

为了测量金属和绝缘表面两种材料的粗糙度参量,采用了基于激光散射法的斜入射粗糙度测量系统。用半导体激光器作光源,用互补金属氧化物半导体工业相机拍摄粗糙度表面的散射光斑,分析光斑特征参量与粗糙度之间的对应关系,通过理论分析和实验验证了特征参量与粗糙度值之间存在单调性关系,利用MATLAB设计图形用户界面,实现粗糙度值的一键式测量功能。结果表明,该系统的系统结构简单,对金属样品和塑料绝缘表面进行测试,测量结果与触针式测量之间的误差小于8%(其中绝缘表面小于5%),能够实现不同材料表面的粗糙度值测量。这一结果对物体表面的粗糙度测量研究是有帮助的。

In order to measure the roughness parameters of metal and insulating surface,the oblique incidence roughness measurement system based on laser scattering was adopted.Using a semiconductor laser source,the scattering spot of roughness surface was photographed by complementary metal-oxide-semiconductor transistor industrial camera.The correspondence between the speckle characteristic parameters and roughness was then analyzed.According the theoretical and experimental study,the monotonic relation between the characteristic parameters and the roughness was verified.By using MATLAB to design graphical user interface,the function of one-key roughness measurement was realized.The results show that the system’s structure is simple,and the error between the measurement result and stylus measurement result is less than 8%(the insulation surface is less than 5%),so the roughness of different materials can be measured.This result is helpful to the study of roughness measurement of object surface.