超宽带矩形微同轴滤波器制备及性能分析

Preparation and performance analysis of ultra-wideband rectangular micro-coaxial filter

在射频微系统对高性能超宽带滤波器的需求下,基于矩形微同轴制备技术研究了10GHz^50GHz的超宽带矩形微同轴滤波器的设计及制备。在矩形微同轴传输线的电路基础上进行电路实现,对超宽带矩形微同轴滤波器模型进行仿真试验,结果显示,在10GHz^50GHz工作带宽内插入损耗小于0.8dB,回波损耗优于17dB,带外抑制达到45dB。基于矩形同轴结构的制备流程经过九次光刻-电铸-平坦化过程及一次介质支撑结构光刻后完成十层滤波器样件的制备,测得制备的滤波器样件性能与仿真曲线基本吻合,在40GHz时插入损耗为0.6dB,回波损耗为21.6dB,在5GHz和55GHz时带外抑制分别为41.8dB和43.9dB。矩形同轴结构的低损耗、高频段等优点在该超宽带矩形微同轴滤波器中有良好的体现。

The design and preparation of 10GHz^50GHz ultra-wideband micro coaxial filter based on rectangular micro coaxial fabrication technology is studied under the requirement of RF microsystems for high-performance ultra-wideband filters.The model of micro coaxial filter is based on micro coaxial transmission line circuit,and its simulation results show that the insertion loss is less than 0.8dB,the return loss is superior to 17dB,and the out-of-band suppression is up to 45dB.This 10-layer-filter is completed through rectangular micro coaxial fabrication process after nine lithography-electroformingflattening processes and a support structure lithography.The test results of the filter samples show that the insertion loss is 0.6dB and the return loss is 21.6dB at 40GHz,the restraint outside the band are 41.8dB and 48.9dB at 5GHz and 55GHz,the curve of which is consistent to the simulation curve.The ultra-wideband rectangular micro coaxial filter reflect the advantages of rectangular coaxial structure well,such as low less and high isolation.