氧化锌纳米阵列制备及气敏性能研究

Preparation and Gas Sensitivity of Zinc Oxide Nanoarrays

为了研究氧化锌纳米线传感器的气敏性能,通过磁控溅射法和水热合成法制备了贵金属Pd掺杂的氧化锌纳米阵列,对制备所得的样品结构和样貌进行了分析,着重研究了掺杂对氧化锌纳米阵列气体传感器的气敏性能的影响,得到贵金属的掺杂能够提高对气体的响应度,并在一定程度上提高气体的灵敏性能。最后,分析了样品的气体传感机理。研究结果表明:在最佳温度下,金属Pd掺杂能够对原件的气敏性能进行改善。

In order to study the gas sensing properties of zinc oxide nanowire sensors,Pd-doped zinc oxide nanoarrays were prepared by magnetron sputtering and hydrothermal synthesis.The structure and morphology of the samples were analyzed.The effect of doping on the gas sensing performance of zinc oxide nano-array gas sensors was studied.The results showed that the doping of noble metal can improve the gas response and gas sensitivity to a certain extent.Finally,the gas sensing mechanism of the samples was analyzed.The results showed that the gas sensitivity of the samples can be improved by Pd doping at optimum temperature.