光伏电池片成膜工艺技改与节能减排研究

常压化学气相淀积表面成膜(APCVD)工艺流程长,能耗、物耗高,污染物产生量大。采用等离子化学气相淀积(PECVD)工艺按水平组合正交表的设计方法,选择SiH4流量、NH3流量、温度、时间、射频功率、腔内压、淀积速率与淀积厚度8项因素,分别进行了L9(34)三水平四因素试验。以PECVD工艺替代APCVD,实现了年节电326.4万k W·h,减排污水2.63万t、CODCr5.71 t、氟化物1.17 t、氨气0.15 t和氮氧化物0.11 t。

Atmospheric pressure chemical vapor deposition surface deposition(APCVD)has a long process,high energy and material consumption,and a large amount of pollutants.Using the plasma chemical vapor deposition(PECVD)process according to the level to combine the orthogonal table design method,choose the 8 factors of SiH4,NH3 flow rate,temperature,time,RF power,cavity pressure,deposition rate and the deposition thickness,the L9(34)namely three-level four-factors test was conducted respectively.Replaces the APCVD method with PECVD process,achieved an annual power saving 3.264 million kW·h,emission reduction of 26300 tons of sewage,CODcr5.71 tons,1.17 tons of fluoride,0.15 tons of ammonia and 0.11 tons of nitrogen oxides.