基于有限元分析的光学透镜半柔性支撑结构

Semi Flexible Supporting Structure of Optical Lens Based on Finite Element Analysis

光学透镜的面形精度是影响干涉仪等光学系统性能的重要因素之一。其中光学透镜的自重是引起透镜的面形发生变化的主要原因。为了提高由光学透镜的面形精度,设计了一种具有辅助刚体的光学透镜半柔性支撑结构。通过Abaqus有限元分析软件,模拟出在半柔性支撑结构下光学透镜自重对其自身面形的影响。分析的最终结果表明:光学透镜的上表面与下表面的面形RMS值分别为3.51 nm和4.64 nm。由此可以得出,设计的具有辅助刚体的光学透镜半柔性支撑结构可以充分满足干涉仪等光学系统对光学透镜面形的精度要求。

The surface accuracy of optical lens is one of the important factors that affect the performance of optical system such as interferometer.Among them,the self weight of the optical lens is the main reason for the change of the surface shape of the lens.In order to improve the surface accuracy of the optical lens,a semi flexible supporting structure with auxiliary rigid body is designed.By using ABAQUS finite element analysis software,the influence of the self weight of the optical lens on its own surface shape under the semi flexible support structure is simulated.The final results show that the RMS values of the upper surface and the lower surface of the optical lens are 3.51 nm and 4.64 nm respectively.It can be concluded that the semi flexible supporting structure of the optical lens with auxiliary rigid body can fully meet the accuracy requirements of the interferometer and other optical systems for the shape of the optical lens.