在片校准标准件基底边界条件影响

The Influence of Calibration Substrate Boundary Conditions to On-wafer Calibration Standards

通过分析国内外校准标准件物理边界条件,研究不同校准基底的物理边界条件对共面波导(CPW)传输线特性和校准准确度的影响。研制了W波段砷化镓衬底的多线TRL在片校准标准件,将在片校准标准件分别放置在金属卡盘、玻璃片、吸波材料三种校准基底上。用三种不同校准基底的校准标准件对试验装置校准后,分别提取了CPW传输线的衰减常数、相对介电常数和特征阻抗,并对商用校准标准件104-783A的短路标准和传输线标准进行了测试,验证了结果的合理性。

Throught international research of calibration substrate boundary conditions is analyzed.The influence of different calibration substrate boundary conditions on the characteristics and calibration accuracy of coplanar waveguide(CPW)transmission lines is introduced.A multi-line TRL on-wafer calibration standards for W band GaAs substrate was developed,it is placed on metal chuck,glass and absorbing material.After calibrating the system with three calibration standards with different calibration substrates,the attenuation constants,relative permittivity and characteristic impedance of CPW transmission lines are extracted respectively,the short standard and transmission line standard of commercial calibration standards 104-783A are tested to verify the rationality of the results.