3Dong Lin, Zhiyin Gan. Hermeticity investigation of MEMS vacuum packaging[D]. 7th International Conference on Electronics Packaging Technology,2006.
4M. Bergoglioa, G. Brondinob, A. Calcatellia, G. Raiteria, G. Rumianoa. Mathematical model applied to the experimental calibration results of a capillary standard leak [ J ]. Flow Measurement and Instrumentation, 2006 ( 17 ) : 129 - 138.
5G.M. Solomon. Standardization and temperature correction of calibrated leaks [ J ]. J. Vac. Sci. Technol, 1986 (3) A4: 327 - 333.
6T. Kagawa, M. Shimizo. Y. Morita. Heat conduction effect of the chamber wall on the air pressure dynamics[ J]. Proceedings of measurement and Automatic control Association, 1987,23(8).
