溶胶-凝胶法制备的用于模式控制型液晶透镜的AZO高电阻薄膜

Properties of AZO film prepared by Sol-Gel in liquid crystal lens with modal control

采用溶胶-凝胶法制备了掺杂摩尔分数为5%~20%的Al掺杂ZnO(AZO)高电阻薄膜,采用正方形电阻法表征了薄膜的方块电阻,采用扫描电子显微镜(SEM)对薄膜形貌进行了表征,采用Nano Measurer 1.2软件测量了薄膜晶粒的平均粒径,采用分光光度计表征了薄膜的光谱透过率。当Al掺杂摩尔分数为5%~20%时,方块电阻在2~405 MΩ/□之间逐渐增大,晶粒尺寸在24.35~17.53 nm之间逐渐减小,可见光透过率可达80%左右。制备了不同Al掺杂摩尔分数的AZO高电阻层的模式控制型液晶透镜并研究了其光学干涉特性,掺杂摩尔分数在10%~15%之间,AZO薄膜可满足液晶透镜对薄膜透明度和方块电阻的要求。

Al-doped ZnO(AZO)high-resistance films with the doping mole fraction between 5%~20%are prepared by Sol-Gel method.The sheet resistance of the films are characterized by the square resistance method.The morphology of the films are characterized by scanning electron microscopy(SEM).Nano Measurer 1.2 software is used to measure the mean particle radius of the film grains,and the spectral transmittance of the film was characterized by a spectrophotometer.When the doping mole fraction of Al is between 5%~20%,the sheet resistance gradually increases between 2~405 MΩ/□,the grain size gradually decreases between 24.35~17.53 nm,and the visible light transmittance can reach about 80%.The liquid crystal lenses with modal control of AZO high-resistance layers with different Al doping mole fraction are prepared and their optical interference characteristics are studied.AZO films with the doping mole fraction between 10%and 15%can meet the requirements of liquid crystal lenses for film transparency and square resistance.