摘要
研究中以醋酸铈为前驱体,采用微波等离子化学气相沉积(MPCVD)工艺制备了Ce掺杂的CVD金刚石薄膜.采用扫描电镜(SEM)、X射线衍射(XRD)和拉曼检测,系统地研究了Ce掺杂对金刚石膜的形貌和微观结构的影响.扫描电镜(SEM)检测结果揭示了Ce掺杂可以使薄膜表面生长更多的微米金刚石方晶.X射线衍射(XRD)检测结果表明:Ce的加入可以改变金刚石薄膜中晶粒的择优取向.拉曼(Raman)检测结果显示:当Ce掺杂的通量为0,30,45,60 sccm时,对薄膜中金刚石峰的半高宽值分别为10,18,13,9.研究结果表明:适当的Ce掺杂可以提高薄膜中金刚石的结晶质量.
The cerium(Ⅲ)acetate was used as precursor,and a Ce-doped CVD diamond films were fabricated through the MPCVD process.The systematic characterizations were conducted to study the effects of Ce addition on the morphology and microstructure of diamond film.SEM results reveal that Ce incorporation could increase the growth of micro-size square edge diamond crystals.The X-ray diffraction results manifest quantitively that Ce addition can change the preferential orientation of grains in the diamond films.Raman results demonstrate that the full width at half maximum(FWHM)of the diamond peak are 10,18,13,and 9 when the carrier gas flows at a rate of 0,30,45,60 sccm for Ce additions,respectively.This result means that a certain of Ce addition may improve the diamond crystallinity quality in the films.
作者
刘学杰
诸葛晨昱
王宇晨
LIU Xuejie;ZHU-GE Chenyu;WANG Yuchen(Mechanical Engineering School, Inner Mongolia University of Science and Technology, Baotou 014010, China)
出处
《内蒙古科技大学学报》
CAS
2020年第3期279-284,共6页
Journal of Inner Mongolia University of Science and Technology
基金
国家自然科学基金资助项目(51562031,61765012)
内蒙古自治区自然科学基金资助项目(2014MS0516,2015MS0550)
包头市科学技术基金资助项目(2013J2001-1)。
