几种ITO靶材第二相的分离和特征对比研究

Separation and Characteristics Comparison of Second Phases of Several ITO Targets

以来自不同氧化铟锡(ITO)靶材生产企业(编号为进口A、进口B、国产A、国产B、自制A、自制B)的靶材为对比试样,通过将各试样粉碎、过筛和王水腐蚀的方法分离并提取出各靶材的腐蚀产物,本文对腐蚀产物的剩余量、显微形貌、物相组成、失氧率等进行了观察和测试,并进行分析和对比。结果表明:进口靶材晶内小颗粒倾向于聚集、合并,表现为以60~90 nm小颗粒聚集而成的200 nm以上的团簇,而其他靶材小颗粒独立性更强;腐蚀后产物为近等轴状的第二相In4Sn3O12或近等轴状与片状的In4Sn3O12和In2SnO5混合体;各靶材试样的腐蚀量均达到了90%左右,进口靶材试样腐蚀后的第二相余量更多,且加热后第二相粉末出现了1.3%~1.5%的增氧,而其他靶材的增氧率均在1%以下;计算发现,进口靶材的Sn和O含量均略低于国产靶材和自制靶材。

The indium tin oxide(ITO)targets from different manufacturing enterprises(Abroad A,Abroad B,Native A,Native B,Homemade A,Homemade B)were used as contrast samples.The corrosion products of each target were separated and extracted by crushing,sifting and aqua fort is corrosion.The residual quantity,microstructure,phase group and oxygen generation rate of the corrosion products were observed,tested,analyzed and compared.The results showed that the intra-granular particles in the imported target were inclined to gather and merge,showing more than 200 nm clusters of 60~90 nm small particles,while small particles of other targets were more independent.The products after corrosion were the secondary phase nearequiaxed In4Sn3O12 and the mixtures of nearequiaxed In4Sn3O12 and flaky In2SnO5.The corrosion amount of each target sample all reached about 90%.The second phase residue after the corrosion was more as for the imported target samples and the second phase powder produced 1.3%~1.5%oxygen increase after heating while the oxygen increasing rate of other targets was less than 1%.It was found that the content of Sn and O of the imported target were slightly lower than that of the domestic and homemade target.