占空比调控氮化不锈钢相结构及耐磨性能研究

Study on phase structure and wear resistance of nitriding stainless steel controlled by duty cycle

通过施加不同占空比基体偏压调控316L奥氏体不锈钢表面氮化层结构及力学性能。利用X射线衍射仪、扫描电镜、超景深显微镜、维氏硬度计、纳米压痕仪及球盘式摩擦磨损仪等对试样的微观结构及力学性能进行表征。结果表明,占空比的增加使氮化层中活性氮原子数分数升高,最高氮原子数分数可达44.4%。占空比为80%试样的维氏硬度及显微硬度最高,分别为1134 HV和17 GPa;摩擦系数降低为0.146,磨损面积最低。

The structures and mechanical properties of nitrided layers on 316L austenitic stainless steel were controlled by applying different duty cycles of substrate bias.The microstructure and mechanical properties of the samples were characterized by X-ray diffraction,scanning electron microscopy,super depth of field microscope,Vickers hardness tester,nano indentation tester,and ball disk friction and wear tester.The results show that the concentration of nitrogen atoms in the nitrided layers increases with the increase of duty cycle,and the highest nitrogen content is 44.4 at%.The sample with 80%duty cycle exhibited the highest Vickers hardness of 1134 HV and microhardness of 17 GPa,corresponding to a reduced friction coefficient of 0.146 and the smallest wear area.