曲面上化学气相沉积的二维材料研究

Study of two-dimensional materials for chemical vapor deposition on curved surfaces

过渡金属硫系化合物二维材料因其体积小、直接带隙发光等特点,可作为微纳光学结构的优异介质材料而受到广泛关注。通过转移法得到的二维材料微纳光学结构,如光学微腔、微纳传感器等,容易引起材料污染和破损,对结构的功能特性影响很大。通过化学气相沉积法(CVD),将硒化钨直接沉积在6μm直径的二氧化硅(SiO2)微球上,对微球上的材料进行成分表征,证明在微球上生长出了二维材料硒化钨,且证明了通过化学气相沉积法在曲面上沉积二维材料是可行的。这种化学气相沉积法直接生长的二维材料微纳球腔,有望应用于高性能光学传感器和微纳光源器件中。

Two-dimensional(2D)transition-metal dichalcogenides have attracted much attention because of its small size and direct band gap properties,which can be used as an excellent luminescent medium in micro-nano optical structures.The 2D materials based micro-nano structure,such as optical microcavity and micro-nano sensor,are always obtained by the transferring method.However,contaminations and damage to the materials are hard to be avoided during material transfer,which will greatly affect the functionality of the structure.Direct growth of the 2D material on the micro/nano structure can solve this problem.WSe2 is deposited directly on the surface of 6μm-diameter SiO2 sphere cavities by chemical vapor deposition(CVD)method,the compositional characterization of the materials on the microspheres proved that WSe2 was grown on the microspheres,and it was proved that it is feasible to deposit two-dimensional materials on the curved surface by chemical vapor deposition.This 2D material based cavity is expected to be good candidates in high-performance optical sensors and light source devices.It also provides a basis for in-depth study of the exciton characteristics of two-dimensional materials in the highstrain condition induced by curved surface.