基于ASPEN PLUS的六氟化硫提纯工艺研究

Research on Distillation of Pure Sulfur Hexafluoride Based on ASPEN PLUS

提出了一种适合提纯电子级六氟化硫的低温精馏工艺路线。采用ASPEN模拟软件进行了模拟计算,使用灵敏度分析考察了回流比、进料位置、高低沸采出量等对分离效果的影响。确定了最优工艺操作参数,T1的塔顶采出量设定为3.9kg/h,质量回流比设定为37,进料板在13块板。T2的塔釜采出量设定为0.5kg/h,质量回流比设定为1.2,进料板在20块板。结果表明,本工艺可生产高纯SF6产品,纯度可达99.999%,C2F6和C3F8的分数体积不超过3.2×10-6,满足电子级SF6的使用要求。

One technology for producing pure sulfur hexafluoride was demonstrated,ASPEN PLUS was used to design process conditions such as reflux ratio,feed stage and distillation rate,and optimized those through method of sensitivity analysis. The flow rate of T1 tower top was set as 3. 9 kg/h,the mass reflux ratio of T1 tower was set as 37,and the feed stage of T1 tower was set as 13 th plate. The flow rate of T2 tower bottom was set as 0. 5 kg/h,the mass reflux ratio of T2 tower was set as 1. 5,and the feed stage of T2 tower was set at 20 th plate. Results show that the process can produce high purity SF6 products with content of 99. 999%,the content of C2F6 and C3F8 can not exceed 3. 2 ppm,which can meet the requirements of electronic grade SF6.