基于嵌入式技术的超精密光学元件瑕疵检测研究

Research on defect detection of ultra-precision optical components based on embedded technology

针对当前光学元件瑕疵检测精度的问题,设计了基于嵌入式技术的超精密光学元件瑕疵检测方法。首先采用单片机作为嵌入式检测方法的主控制器,将嵌入式WinCE操作平台应用于主控制器中实现超精密光学元件的瑕疵检测,通过数据采集模块利用数据转接器转换后将所采集信号发送至主控制模块,主控制模块将信号通过数据传输模块处理后发送至瑕疵检测模块中,瑕疵检测模块通过相移干涉超精密光学元件瑕疵检测方法实现超精密光学元件瑕疵数据检测,并将检测结果发送至数据处理模块,由数据处理模块处理检测结果后发送至LCD显示模块,实现人机交互。实验结果表明,该方法检测10种不同超精密光学元件瑕疵检测精度均高于99%,检测时间均低于15 ms。

Aiming at the precision problem of optical component defect detection,a method of ultra-precision optical component defect detection based on embedded technology is designed.First of all,MCU is used as the main controller of embedded detection method.The embedded WinCE operation platform is applied to main controller to realize flaw detection of ultra-precision optical elements.The collected signal is sent to main control module through data acquisition module using data adapter conversion.The main control module processes the signal through data transmission module and then sends it to flaw detection module.The defect detection module realizes data defect detection of ultra-precision optical elements through phase-shifting interference ultra-precision optical element defect detection method,and sends the detection results to data processing module,which processes the detection results and then sends them to LCD display module to realize human-computer interaction.The experimental results show that the detection accuracy of the method is higher than 99%and the detection time is lower than 15 ms.