膜片式液压微位移放大机构的双向流固耦合分析

Bidirectional Fluid-structure Interaction Analysis Based on Hydraulic Amplification Mechanism

压电陶瓷材料具有优良的力学性能和动态特性,但根据其逆压电效应研发的驱动器输出位移小,大多仅为微米级,因此需设计相应的微位移放大机构以放大驱动器的位移输出。根据先前提出的膜片式液压微位移放大机构,进行了理论模型的推导,并运用ANSYS Workbench软件对其进行双向流固耦合分析。将仿真结果和实验结果进行对比,验证了仿真结果的准确性。通过仿真分析得到了放大机构的动态变化过程以及不同形状的流道对放大过程的影响,为后续放大机构的优化设计提供理论依据。

Piezoelectric ceramic materials have excellent mechanical properties and dynamic characteristics,but the output displacement of the driver developed based on its inverse piezoelectric effect is small,mostly only in the order of micrometers.Therefore,it is necessary to design a corresponding micro-displacement amplification mechanism to amplify the displacement output of the driver.Based on the previously proposed diaphragm-type hydraulic micro-displacement amplification mechanism,the theoretical model is derived,and the bidirectional fluid-structure interaction analysis is performed using ANSYS Workbench software.The accuracy of the simulation is verified by comparing with the experiment.Through simulation analysis,the dynamic change process of the magnification mechanism and the influence of different shapes of flow channels on the magnification process are obtained.This provides a theoretical basis for the optimal design of subsequent amplification mechanisms.