摘要
对薄膜铁芯微观结构的研究与改进有利于提高微型磁器件的综合性能,文中使用标准MEMS工艺制备了具有纳米孔结构的薄膜铁芯,对不同孔径的纳米孔薄膜铁芯进行了相关的表征与测试,分析了孔径大小对薄膜软磁性能的影响。实验分析的结论为确定制备方案和提高性能指标提供了支持。
The research and improvement of thin film iron core microstructure is conducive to improving the comprehensive performance of micro magnetic devices.In this paper,nanoporous thin film iron cores were prepared by standard MEMS technolo-gy.The related characterization and testing of nanoporous thin film iron cores with different apertures were carried out,and the in-fluence of aperture size on the soft magnetic properties of thin films was analyzed.The conclusion of the experimental analysis pro-vides support for the determination of the preparation scheme and the improvement of the performance index.
作者
吕辉
李根
LYU Hui;LI Gen(Electrical Engineering and Automation Institute,Henan Polytechnic University,Jiaozuo 454000,China;Information Engineering Institute,Henan College of Industry Information Technology,Jiaozuo 454000,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2020年第9期19-22,50,共5页
Instrument Technique and Sensor
基金
河南省自然科学基金资助项目(162300410123)
河南理工大学博士基金资助项目(B2017-22)。
关键词
纳米孔
薄膜铁芯
微型磁器件
制备工艺
nanoporous
thin film iron core
micro magnetic device
preparation technology
