基于少模氮化硅微环谐振器的折射率传感技术

Refractive index sensing technology based on few-mode silicon nitride micro-ring resonator

针对微环谐振器用于折射率传感时动态范围较窄的问题,提出了一种基于少模氮化硅微环谐振器的折射率传感技术,使谐振波长漂移的计算能够不用考虑原始参考值以及增大折射率探测范围,并验证高阶模对环境变化更敏感。通过理论分析,建立仿真模型,验证了该方法的可行性,并使用具有不同折射率的待测溶液开展传感实验,得到了91.79 nm/RIU的折射率灵敏度与10-5 RIU的分辨率。

Aiming at the problem of narrow dynamic range when microring resonators are used for refractive index sensing,this paper proposes a refractive index sensing technology based on few-mode silicon nitride micro-ring resonators,which enables the calculation of resonance wavelength drift without considering the original reference value and increase the refractive index detection range,and verify that higher-order modes are more sensitive to environmental changes.After theoretical analysis,a simulation model is established to verify the feasibility of the method,and the sensing experiment is carried out with the solution to be tested with different refractive index.Finally,the refractive index sensitivity of 91.79 nm/RIU and the resolution of 10-5 RIU are obtained.