优化HAD结构提高CCD紫外谱段量子效率的研究

Research on Technology to Enhance the Quantum Efficiency in Ultraviolet Spectral Range of CCD

硅基正照式CCD探测器的紫外谱段响应普遍较低。针对如何提高正照式CCD在340 nm^390 nm谱段的紫外光探测性能进行了研究。在研究中,对正照式紫外线阵CCD进行了透射膜层优化,达到了光敏区表面对紫外波段光减少反射的效果;对CCD光敏区的结构进行了设计优化,达到光敏区降低界面态干扰的目的;对HAD结构的结构参数进行了优化,获得了极浅结的HAD结构。通过减反射膜、光敏区结构、HAD结构等三个方面的优化,较大程度地提升了正照式CCD紫外谱段的相互作用量子效率,从而提升了CCD对紫外谱光探测的量子效率。研究结果表明,正照式紫外线阵CCD探测器在300 nm^400 nm谱段范围内平均量子效率达到46.13%,其中340 nm^390 nm谱段范围内平均量子效率从8.6%提高到了47.48%。

Front-illuminated charge-coupled devices(CCD)based on silicon substrate always have a lower response in ultraviolet spectral range.Research of enhancing the quantum efficiency performance of the front-illuminated CCD in ultraviolet spectral range was presented. The better result of the transmission film in ultraviolet spectral range at photo sensitive surface,the reduction of interference by surface state at photo-sensitive area and the ultra thin-film hole-accumulation diode(HAD)have been achieved based on the optimization design of anti-reflecting film,the photo-sensitive structure of front-illuminated CCD,as well as the structure and process parameter optimization of HAD that were carried on during the research. The beneficial effect of the greater increase in quantum efficiency performance of the front-illuminated CCD in ultraviolet spectral range detect came from the optimization of anti-reflecting film,the photo sensitive area and the HAD structure,as well as promoting the interacting quantum efficiency of the CCD.The research result indicates that the linear CCD has reached an average quantum efficiency of 46.13% in the spectral range that covers 300 nm^400 nm,and the average quantum efficiency has increased from 8.6% to 47.48% in 340 nm^390 nm spectral range.