多对棒多晶硅还原炉径向热辐射的角系数

Angular Coefficient of Radial Heat Radiation in Poly-silicon CVD Reactor

研究多晶硅还原炉的辐射散热对降低还原过程电耗的重要意义。对60对和84对棒多晶硅还原炉中硅棒径向热辐射的角系数进行了计算,并对不同硅棒直径的径向热辐射功率、径向热辐射单位能耗进行了分析。结果表明还原炉径向热辐射角系数和径向热辐射单位能耗随着硅棒数量和直径增加而减小,相对40对棒还原炉,节能效果明显。

It is important to study the radiation heat loss of the reactors to reduce the power consumption of the polysilicon CVD process.In this paper,the angular coefficients of the radial heat radiation of the silicon rods in the 60 pairs and 84 pairs of polysilicon CVD reactors are calculated,and the radial heat radiation power and the average energy consumption of the radial heat radiation with different silicon rod diameters are analyzed.The results indicate that the radial heat radiation angle coefficient and the average energy consumption of the radial heat radiation of the CVD reactors decrease with the increase of the number and diameter of silicon rods.Compared with the CVD reactors of 40 pairs of rods,the energy saving effect of the 60 pairs and 84 pairs of polysilicon CVD reactors is obvious.