三维微细电解加工微型腔侧壁缺陷的形成机理与改进机制

Forming Mechanism of Microcavity Sidewall Defects in 3D Micro-ECM and Its Improvement Mechanism

针对三维微细电解加工较大深度的微型腔时侧壁存在大量微孔缺陷的问题,采用一种三维叠层微电极振动辅助电解加工三维微型腔的方法,分别利用纯NaNO3电解液和含有均匀悬浮B4C粉末的NaNO3电解液进行微细电解加工实验,制备深度大于800μm、具有复杂孤岛结构的三维微型腔,并聚焦研究三维微型腔侧壁缺陷的形成机理与改进机制。结果表明,在NaNO3电解液中添加B4C粉末后,可避免微细电解加工产生微盲孔与微孔条纹,侧壁质量得到明显提升。

Aiming at the problem of serious defects such as quantities of micro-holes on the side wall of the micro-cavity with depth in 3D micro-ECM,a method of vibration-assisted 3D laminated micro-electrode ECM of micro-cavities was proposed.The experiments of micro-ECM using pure NaNO3 solution and another copy containing uniformly suspended B4C particles as electrolyte were conducted to fabricate 3D microcavities with depth of more than 800μm and morphology of complex islands,while the forming mechanism and its measurement of defects on sidewall of microcavity were focused on.The result showed that the addition of B4C powder to the NaNO3 solution can avoid micro blind holes and additional streaks caused by micro-ECM,and the quality of sidewall is significantly improved.