摘要
Monoclinic Ga2O3(β-Ga2O3)is a promising material for achieving solar-blind photodetection because of its unique characteristics,including its high breakdown electric field,radiation hardness,thermal and chemical stabilities,and intrinsic visible/solar-blind properties.Until now,several studies have investigated the development of high-performanceβ-Ga2O3 solar-blind photodetectors.However,these photodetectors can only detect the light intensity but not the light position.In this work,fourquadrant position-sensitive detectors(4Q-PSDs)were developed and demonstrated based onβ-Ga2O3.4Q-PSDs,comprising four identical metal-semiconductor-metal-structured photodetector components,demonstrate high uniformity,large signal-tonoise ratio,good ultraviolet/visible rejection ratio,and fast response/recovery time.Subsequently,the position of the illumination beam can be determined by analyzing the output signals of the four photodetector components.This work may indicate the promising application potential of the Ga2O3-based photodetectors in the fields of positioning,aligning,and monitoring the solarblind beams.
基金
supported by the National Key Research and Development Program of China(Grant No.2018YFB0406500)
the National Natural Science Foundation of China(Grant Nos.61804136,U1804155,and U1604263)
the China Postdoctoral Science Foundation(Grant Nos.2018M630829,and 2019T120630)。